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MEMS and microsystems : design, manufacture, and nanoscale engineering /
| Main Author: | |
|---|---|
| Format: | Printed Book |
| Published: |
Hoboken, N.J. :
John Wiley,
c2008.
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| Edition: | 2nd ed. |
| Subjects: | |
| Online Access: | http://www.loc.gov/catdir/toc/ecip0716/2007017041.html http://www.loc.gov/catdir/enhancements/fy0741/2007017041-d.html http://www.loc.gov/catdir/enhancements/fy0806/2007017041-b.html |