Fundamentals of microfabrication and nanotechnology

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Bibliographic Details
Main Author: Madou, Marc J
Format: Printed Book
Language:English
Published: Boca Raton CRC Press 2012
Edition:3rd ed.
Subjects:
Microelectromechanical systems
Nano electromechanical systems
Microfluidics
Solidstate physics
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Fundamentals of microfabrication and nanotechnology /
by Madou, Marc J.
Published 2012
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