Fundamentals of microfabrication and nanotechnology

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Manylion Llyfryddiaeth
Prif Awdur: Madou, Marc J
Fformat: Printed Book
Iaith:English
Cyhoeddwyd: Boca Raton CRC Press 2012
Rhifyn:3rd ed.
Pynciau:
Microelectromechanical systems
Nano electromechanical systems
Microfluidics
Solidstate physics
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Fundamentals of microfabrication and nanotechnology /
gan Madou, Marc J.
Cyhoeddwyd 2012
Cael y testun llawn
Printed Book
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