MEMS and microsystems: design and manufacture

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Sonraí Bibleagrafaíochta
Príomhúdar: Hsu, Tai-Ran
Formáid: Printed Book
Teanga:English
Foilsithe: New Delhi Tata McGraw- Hill 2005
Ábhair:
Microelectronics > Electronics > Semiconductors > Microelectromechanical systems > MEMS > Microelectronic packaging
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Mems and microsystems design and manufacture /
le Hsu, Tai-ran
Foilsithe 2002
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