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Silicon nitride for microelectronic applications, 6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices.
| Autore principale: | |
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| Natura: | Printed Book |
| Lingua: | English |
| Pubblicazione: |
New York,
IFI/Plenum,
1971-72.
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| Serie: | Handbook of electronic materials ;
v. 3, etc. |
| Soggetti: |
| Descrizione fisica: | 6 v. illus. 28 cm. |
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| ISBN: | 0306671034 |