Silicon nitride for microelectronic applications, 6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices.

Bibliographic Details
Main Author: Milek, John T.
Format: Printed Book
Language:English
Published: New York, IFI/Plenum, 1971-72.
Series:Handbook of electronic materials ; v. 3, etc.
Subjects:
Microelectronics--Materials. > Silicon nitride

PHY

Holdings details from PHY
Call Number: 621.381/7 MIL.3
621.381/7 MIL.6
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