Loading...
Silicon nitride for microelectronic applications, 6v.; v3. & v6. silicon nitiride for microelectronic applications, pt. 1. Preparation and properties., pt. 2. Applications and devices.
| Main Author: | |
|---|---|
| Format: | Printed Book |
| Language: | English |
| Published: |
New York,
IFI/Plenum,
1971-72.
|
| Series: | Handbook of electronic materials ;
v. 3, etc. |
| Subjects: |
| Physical Description: | 6 v. illus. 28 cm. |
|---|---|
| ISBN: | 0306671034 |