Microelectromechanical systems 7 Microfabrication 3 Electric properties 2 Lasers 2 MEMS 2 Microelectronic packaging 2 Microelectronics 2 Microfluidics 2 Nanoelectromechanical systems 2 Nanoelectronics 2 Nanomanufacturing 2 Nanostructured materials 2 Solid state physics 2 Analytical biotechnology-- Biotechnology -- methods 1 Biocompatible Materials 1 Bioengineering-- Microfabrication-- Biomedical Engineering 1 Biosensors 1 Biotechnology 1 Chemistry 1 Design and construction 1 Electronic apparatus and appliances 1 FUNDAMENTALS OF MICROFABRICATION AND NANOTECHNOLOGY V.1 1 FUNDAMENTALS OF MICROFABRICATION AND NANOTECHNOLOGY V.2 1 FUNDAMENTALS OF MICROFABRICATION AND NANOTECHNOLOGY V.3 1 Gas detectors 1 Integrated circuits 1 Machining 1 Magnetic fields 1 Magnetic instruments 1 Nanotechnology--OXIDE nanostructures--nanolithography--chemical sensor 1