Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS

Benzer Materyaller

• Vacuum technology, thin films, and sputtering : an introduction /
  Yazar:: Stuart, R. V.
  Baskı/Yayın Bilgisi: (1983)
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  Yazar:: Stuart, R. V.
  Baskı/Yayın Bilgisi: (1983)
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• Topics in current physics, Vol.37: Thin film and depth profile analysis
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