Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS

Bibliographic Details
Main Author: Wasa, Kiyotaka; Kanno, Isaku and Kotera, Hidetoshi
Format: Printed Book
Published: Elsevier 2012
Edition:2
Subjects:
Cathode sputtering (Plating process),Thin films

University of Kerala

Holdings details from University of Kerala
Call Number: NA2112K8(Q2) K8
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