Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS

Sonraí Bibleagrafaíochta
Príomhúdar: Wasa, Kiyotaka; Kanno, Isaku and Kotera, Hidetoshi
Formáid: Printed Book
Foilsithe: Elsevier 2012
Eagrán:2
Ábhair:
Cathode sputtering (Plating process),Thin films

University of Kerala

Sonraí sealbhúcháin ó University of Kerala
Gairmuimhir: NA2112K8(Q2) K8
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