Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS

Antzeko izenburuak

• Vacuum technology, thin films, and sputtering : an introduction /
  nork: Stuart, R. V.
  Argitaratua: (1983)
• Vacuum technology, thin films, and sputtering : an introduction /
  nork: Stuart, R. V.
  Argitaratua: (1983)
• Sputtering materials for VLSI and thin film devices /
  nork: Sarkar, Jaydeep
• Thin-film deposition : principles and practice /
  nork: Smith, Donald L.
  Argitaratua: (1995)
• Topics in current physics, Vol.37: Thin film and depth profile analysis
  nork: Oechsner, H, Ed
  Argitaratua: (1984)