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Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS

Detalhes bibliográficos
Autor principal:	Wasa, Kiyotaka; Kanno, Isaku and Kotera, Hidetoshi
Formato:	Printed Book
Publicado em:	Elsevier 2012
Edição:	2
Assuntos:	Cathode sputtering (Plating process),Thin films

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