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Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS
| Egile nagusia: | Wasa, Kiyotaka; Kanno, Isaku and Kotera, Hidetoshi |
|---|---|
| Formatua: | Printed Book |
| Argitaratua: |
Elsevier
2012
|
| Edizioa: | 2 |
| Gaiak: |
Antzeko izenburuak
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Vacuum technology, thin films, and sputtering : an introduction /
nork: Stuart, R. V.
Argitaratua: (1983) -
Vacuum technology, thin films, and sputtering : an introduction /
nork: Stuart, R. V.
Argitaratua: (1983) -
Sputtering materials for VLSI and thin film devices /
nork: Sarkar, Jaydeep -
Thin-film deposition : principles and practice /
nork: Smith, Donald L.
Argitaratua: (1995) -
Topics in current physics, Vol.37: Thin film and depth profile analysis
nork: Oechsner, H, Ed
Argitaratua: (1984)