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Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS

Dades bibliogràfiques
Autor principal:	Wasa, Kiyotaka; Kanno, Isaku and Kotera, Hidetoshi
Format:	Printed Book
Publicat:	Elsevier 2012
Edició:	2
Matèries:	Cathode sputtering (Plating process),Thin films

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