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Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS
| Prif Awdur: | Wasa, Kiyotaka; Kanno, Isaku and Kotera, Hidetoshi |
|---|---|
| Fformat: | Printed Book |
| Cyhoeddwyd: |
Elsevier
2012
|
| Rhifyn: | 2 |
| Pynciau: |
Eitemau Tebyg
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Vacuum technology, thin films, and sputtering : an introduction /
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Vacuum technology, thin films, and sputtering : an introduction /
gan: Stuart, R. V.
Cyhoeddwyd: (1983) -
Sputtering materials for VLSI and thin film devices /
gan: Sarkar, Jaydeep -
Thin-film deposition : principles and practice /
gan: Smith, Donald L.
Cyhoeddwyd: (1995) -
Topics in current physics, Vol.37: Thin film and depth profile analysis
gan: Oechsner, H, Ed
Cyhoeddwyd: (1984)