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| LEADER |
00739nam a2200193 4500 |
| 020 |
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|a 9781437734836
|c 12337.00
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| 082 |
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|a R 671.738 WAS-S2
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| 100 |
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|a Wasa, Kiyotaka; Kanno, Isaku and Kotera, Hidetoshi
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| 245 |
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|a Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS
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| 250 |
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|a 2
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| 260 |
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|a Elsevier
|c 2012
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| 300 |
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|a 644
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| 490 |
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| 500 |
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| 590 |
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|a Modern Book Centre
|b MBC/0739/2018 dt 10/09/2018
|c 12337.00
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| 650 |
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|a Cathode sputtering (Plating process),Thin films
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| 942 |
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|c REF
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| 999 |
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|c 86307
|d 86307
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| 952 |
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|r 2019-09-24
|w 2019-09-24
|y REF
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