Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS

Documenti analoghi

• Vacuum technology, thin films, and sputtering : an introduction /
  di: Stuart, R. V.
  Pubblicazione: (1983)
• Vacuum technology, thin films, and sputtering : an introduction /
  di: Stuart, R. V.
  Pubblicazione: (1983)
• Sputtering materials for VLSI and thin film devices /
  di: Sarkar, Jaydeep
• Thin-film deposition : principles and practice /
  di: Smith, Donald L.
  Pubblicazione: (1995)
• Topics in current physics, Vol.37: Thin film and depth profile analysis
  di: Oechsner, H, Ed
  Pubblicazione: (1984)