APA Edition Citation

Wasa, K. K. (2012). Handbook of sputter deposition technology: Fundamentals and applications for functional thin films, nano-materials and MEMS (2.).

Chicago Edition Citation

Wasa, Kiyotaka; Kanno. Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-materials and MEMS. 2. Elsevier, 2012.

MLA Edition Citation

Wasa, Kiyotaka; Kanno. Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-materials and MEMS. 2. 2012.