Dyfyniad APA

Wasa, K. K. (2012). Handbook of sputter deposition technology: Fundamentals and applications for functional thin films, nano-materials and MEMS (2.).

Dyfyniad Arddull Chicago

Wasa, Kiyotaka; Kanno. Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-materials and MEMS. 2. Elsevier, 2012.

Dyfyniad MLA

Wasa, Kiyotaka; Kanno. Handbook of Sputter Deposition Technology: Fundamentals and Applications for Functional Thin Films, Nano-materials and MEMS. 2. 2012.

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