Patterning of materian layers in submicron region

Míreanna Comhchosúla

• Patterning of material layers in submicron region
  le: Tandon, U S; Khokle, W S
  Foilsithe: (1993)
• Lithography main techniques
  le: Landis, Stefan., ed
  Foilsithe: (2011)
• Micro - nano fabrication: technologies and applications
  le: Cui, Zheng
  Foilsithe: (2005)
• Pattering of material layers in submicron region
  le: Tandon, U. S.
  Foilsithe: (1993)
• A history of Lithography
  le: Weber, Wilhelm
  Foilsithe: (1966)