Patterning of materian layers in submicron region

Bibliographic Details
Main Author: Tandon, U S; Khokle, W S
Format: Printed Book
Published: Wiley Eastern Limited, New Delhi 1993
Subjects:
Lithography, Electron beam

University of Kerala

Holdings details from University of Kerala
Call Number: O152,2N05,PR L1,N9
Copy LC1 Live Status Unavailable
Copy LC1 Live Status Unavailable

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