Patterning of materian layers in submicron region

Antzeko izenburuak

• Patterning of material layers in submicron region
  nork: Tandon, U S; Khokle, W S
  Argitaratua: (1993)
• Lithography main techniques
  nork: Landis, Stefan., ed
  Argitaratua: (2011)
• Micro - nano fabrication: technologies and applications
  nork: Cui, Zheng
  Argitaratua: (2005)
• Pattering of material layers in submicron region
  nork: Tandon, U. S.
  Argitaratua: (1993)
• A history of Lithography
  nork: Weber, Wilhelm
  Argitaratua: (1966)