Patterning of materian layers in submicron region

Eitemau Tebyg

• Patterning of material layers in submicron region
  gan: Tandon, U S; Khokle, W S
  Cyhoeddwyd: (1993)
• Lithography main techniques
  gan: Landis, Stefan., ed
  Cyhoeddwyd: (2011)
• Micro - nano fabrication: technologies and applications
  gan: Cui, Zheng
  Cyhoeddwyd: (2005)
• Pattering of material layers in submicron region
  gan: Tandon, U. S.
  Cyhoeddwyd: (1993)
• A history of Lithography
  gan: Weber, Wilhelm
  Cyhoeddwyd: (1966)