Fundamentals of microfabrication /

Opis bibliograficzny
1. autor: Madou, Marc J.
Format: Printed Book
Wydane: Boca Raton, Fla. : CRC Press, c1997.
Hasła przedmiotowe:
Microelectronics.
Integrated circuits
Microelectromechanical systems
Machining.
Microelectronic packaging.
Lasers

Podobne zapisy