Fundamentals of microfabrication /

Bibliografski detalji
Glavni autor: Madou, Marc J.
Format: Printed Book
Izdano: Boca Raton, Fla. : CRC Press, c1997.
Teme:
Microelectronics.
Integrated circuits
Microelectromechanical systems
Machining.
Microelectronic packaging.
Lasers

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