Fundamentals of microfabrication /

Dades bibliogràfiques
Autor principal: Madou, Marc J.
Format: Printed Book
Publicat: Boca Raton, Fla. : CRC Press, c1997.
Matèries:
Microelectronics.
Integrated circuits
Microelectromechanical systems
Machining.
Microelectronic packaging.
Lasers

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