MEMS and microsystems : design, manufacture, and nanoscale engineering /

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Bibliografiska uppgifter
Huvudupphovsman: Hsu, Tai-Ran
Materialtyp: Printed Book
Publicerad: Hoboken, N.J. : John Wiley, c2008.
Upplaga:2nd ed.
Ämnen:
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.
Länkar:http://www.loc.gov/catdir/toc/ecip0716/2007017041.html
http://www.loc.gov/catdir/enhancements/fy0741/2007017041-d.html
http://www.loc.gov/catdir/enhancements/fy0806/2007017041-b.html

Internet

http://www.loc.gov/catdir/toc/ecip0716/2007017041.html
http://www.loc.gov/catdir/enhancements/fy0741/2007017041-d.html
http://www.loc.gov/catdir/enhancements/fy0806/2007017041-b.html

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