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MEMS and microsystems : design, manufacture, and nanoscale engineering /
| 第一著者: | |
|---|---|
| フォーマット: | Printed Book |
| 出版事項: |
Hoboken, N.J. :
John Wiley,
c2008.
|
| 版: | 2nd ed. |
| 主題: | |
| オンライン･アクセス: | http://www.loc.gov/catdir/toc/ecip0716/2007017041.html http://www.loc.gov/catdir/enhancements/fy0741/2007017041-d.html http://www.loc.gov/catdir/enhancements/fy0806/2007017041-b.html |