MEMS and microsystems : design, manufacture, and nanoscale engineering /

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Bibliographic Details
Main Author: Hsu, Tai-Ran
Format: Printed Book
Published: Hoboken, N.J. : John Wiley, c2008.
Edition:2nd ed.
Subjects:
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.
Online Access:http://www.loc.gov/catdir/toc/ecip0716/2007017041.html
http://www.loc.gov/catdir/enhancements/fy0741/2007017041-d.html
http://www.loc.gov/catdir/enhancements/fy0806/2007017041-b.html
Description
Physical Description:xxv, 550 p. : ill. ;
Bibliography:Includes bibliographical references (p. 509-521) and index.
ISBN:9780470083017 (cloth)
0470083018 (cloth)

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