MEMS/MOEMS packaging : concepts, designs, materials, and processes /

Dettagli Bibliografici
Autore principale: Gilleo, Ken
Natura: Printed Book
Pubblicazione: New York : McGraw-Hill, c2005.
Soggetti:
Microelectronic packaging.
Microelectromechanical systems.
Optoelectronic devices.
Accesso online:http://www.loc.gov/catdir/toc/fy0606/2005049594.html
http://www.loc.gov/catdir/enhancements/fy0634/2005049594-b.html
http://www.loc.gov/catdir/enhancements/fy0634/2005049594-d.html
http://www.loc.gov/catdir/enhancements/fy0634/2005049594-t.html
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300 |a xiii, 220 p. :  |b ill. ; 
504 |a Includes bibliographical references (p. 203-213) and index. 
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650 0 |a Optoelectronic devices. 
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