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MEMS/MOEMS packaging : concepts, designs, materials, and processes /
Main Author: | |
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Format: | Printed Book |
Published: |
New York :
McGraw-Hill,
c2005.
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Subjects: | |
Online Access: | http://www.loc.gov/catdir/toc/fy0606/2005049594.html http://www.loc.gov/catdir/enhancements/fy0634/2005049594-b.html http://www.loc.gov/catdir/enhancements/fy0634/2005049594-d.html http://www.loc.gov/catdir/enhancements/fy0634/2005049594-t.html |