Gilleo, K. (2005). MEMS/MOEMS packaging: Concepts, designs, materials, and processes. McGraw-Hill.
Chicago Edition CitationGilleo, Ken. MEMS/MOEMS Packaging: Concepts, Designs, Materials, and Processes. New York: McGraw-Hill, 2005.
MLA Edition CitationGilleo, Ken. MEMS/MOEMS Packaging: Concepts, Designs, Materials, and Processes. McGraw-Hill, 2005.
Warning: These citations may not always be 100% accurate.