Optical inspection of microsystems /

Podrobná bibliografie
Další autoři: Osten, Wolfgang
Médium: Printed Book
Vydáno: Boca Raton, FL : CRC/Taylor & Francis, c2007.
Edice:Optical science and engineering ;
Témata:
Microelectromechanical systems
Quality control
Optical measurements.
Industrial microscopy.
On-line přístup:http://www.loc.gov/catdir/enhancements/fy0648/2005046670-d.html

Internet

http://www.loc.gov/catdir/enhancements/fy0648/2005046670-d.html

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