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Optical inspection of microsystems /
| Other Authors: | |
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| Format: | Printed Book |
| Published: |
Boca Raton, FL :
CRC/Taylor & Francis,
c2007.
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| Series: | Optical science and engineering ;
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| Subjects: | |
| Online Access: | http://www.loc.gov/catdir/enhancements/fy0648/2005046670-d.html |