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Optical inspection of microsystems /

Bibliographic Details
Other Authors:	Osten, Wolfgang
Format:	Printed Book
Published:	Boca Raton, FL : CRC/Taylor & Francis, c2007.
Series:	Optical science and engineering ;
Subjects:	Microelectromechanical systems Quality control Optical measurements. Industrial microscopy.
Online Access:	http://www.loc.gov/catdir/enhancements/fy0648/2005046670-d.html

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