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|a 0849336821 (alk. paper)
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| 020 |
|
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|a 9780849336829
|
| 082 |
0 |
0 |
|a 670.42/5
|
| 245 |
0 |
0 |
|a Optical inspection of microsystems /
|c edited by Wolfgang Osten.
|
| 260 |
|
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|a Boca Raton, FL :
|b CRC/Taylor & Francis,
|c c2007.
|
| 300 |
|
|
|a 503 p., [8] p. of plates :
|b ill. (some col.) ;
|
| 490 |
1 |
|
|a Optical science and engineering ;
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| 504 |
|
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|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Microelectromechanical systems
|
| 650 |
|
0 |
|a Quality control
|
| 650 |
|
0 |
|a Optical measurements.
|
| 650 |
|
0 |
|a Industrial microscopy.
|
| 700 |
1 |
|
|a Osten, Wolfgang.
|
| 856 |
4 |
2 |
|u http://www.loc.gov/catdir/enhancements/fy0648/2005046670-d.html
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| 942 |
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|d 2020-01-16
|l 0
|o 670.425 OST/O
|p DOP1556
|r 2020-01-16
|w 2020-01-16
|y BK
|