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Semiconductor device-based sensors for gas, chemical, and biomedical applications /
| Altri autori: | , |
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| Natura: | Printed Book |
| Pubblicazione: |
Boca Raton, Fla. :
CRC,
c2011.
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| Soggetti: |
Sommario:
- Mems based optical chemical sensors--zno thin film and nanowire based sensor application--