BioNanoFluidic MEMS /

Bibliographic Details
Other Authors: Hesketh, P. J.
Format: Printed Book
Published: New York : Springer, 2008.
Series:MEMS reference shelf
Subjects:
Microelectromechanical systems.
Nanotechnology > OXIDE nanostructures > nanolithography > chemical sensor
Biotechnology.
MEMS.

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