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Principles and applications of NanoMEMS physics /
| 主要作者: | |
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| 格式: | Printed Book |
| 出版: |
Dordrecht, The Netherlands :
Springer,
c2005.
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| 叢編: | Microsystems ;
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| 主題: | |
| 在線閱讀: | http://www.loc.gov/catdir/toc/ecip0513/2005015829.html http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html http://www.loc.gov/catdir/enhancements/fy0824/2005015829-b.html |
書本目錄:
- Nanoelectromechanical systems
- NanoMEMS physics: quantum wave-particle phenomena
- NanoMEMS physics: quantum wave phenomena
- NanoMEMS applications: circuits and systems
- NanoMEMS applications: photonics.