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Principles and applications of NanoMEMS physics /
| Huvudupphovsman: | |
|---|---|
| Materialtyp: | Printed Book |
| Publicerad: |
Dordrecht, The Netherlands :
Springer,
c2005.
|
| Serie: | Microsystems ;
|
| Ämnen: | |
| Länkar: | http://www.loc.gov/catdir/toc/ecip0513/2005015829.html http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html http://www.loc.gov/catdir/enhancements/fy0824/2005015829-b.html |