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Principles and applications of NanoMEMS physics /
| 1. autor: | |
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| Format: | Printed Book |
| Wydane: |
Dordrecht, The Netherlands :
Springer,
c2005.
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| Seria: | Microsystems ;
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| Hasła przedmiotowe: | |
| Dostęp online: | http://www.loc.gov/catdir/toc/ecip0513/2005015829.html http://www.loc.gov/catdir/enhancements/fy0663/2005015829-d.html http://www.loc.gov/catdir/enhancements/fy0824/2005015829-b.html |