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Photonic microsystems : micro and nanotechnology applied to optical devices and systems /

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Bibliographic Details
Main Author:	Solgaard, Olav
Format:	Printed Book
Series:	MEMS reference shelf,
Subjects:	Microelectromechanical systems. Photonics. Optoelectronic devices Optical communications. Microsystèmes électromécaniques. Nanophotonique. Dispositifs optoélectroniques Microtechnologie. Nanotechnologie. Nanophotonik. MEMS. Mikrooptik.

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