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Sputtering materials for VLSI...
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Sputtering materials for VLSI and thin film devices /
Xehetasun bibliografikoak
Egile nagusia:
Sarkar, Jaydeep
Formatua:
Printed Book
Gaiak:
Microelectronics
Cathode sputtering (Plating process)
Integrated circuits
Thin film devices
Flat panel displays
Sputtering (Physics)
Aleari buruzko argibideak
Deskribapena
Antzeko izenburuak
MARC erregistroa
Antzeko izenburuak
Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS
nork: Wasa, Kiyotaka; Kanno, Isaku and Kotera, Hidetoshi
Argitaratua: (2012)
Vacuum technology, thin films, and sputtering : an introduction /
nork: Stuart, R. V.
Argitaratua: (1983)
Vacuum technology, thin films, and sputtering : an introduction /
nork: Stuart, R. V.
Argitaratua: (1983)
Topics in current physics, Vol.37: Thin film and depth profile analysis
nork: Oechsner, H, Ed
Argitaratua: (1984)
Studies on laser induced and RF sputtered plasma using optical emission spectroscopy and langmuir probe
nork: Joshy, N V
Argitaratua: (2008)
Lanean...