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Sputtering materials for VLSI...
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Sputtering materials for VLSI and thin film devices /
Bibliographic Details
Main Author:
Sarkar, Jaydeep
Format:
Printed Book
Subjects:
Microelectronics
Cathode sputtering (Plating process)
Integrated circuits
Thin film devices
Flat panel displays
Sputtering (Physics)
Holdings
Description
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