Sputtering materials for VLSI and thin film devices /

Eitemau Tebyg

• Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS
  gan: Wasa, Kiyotaka; Kanno, Isaku and Kotera, Hidetoshi
  Cyhoeddwyd: (2012)
• Vacuum technology, thin films, and sputtering : an introduction /
  gan: Stuart, R. V.
  Cyhoeddwyd: (1983)
• Vacuum technology, thin films, and sputtering : an introduction /
  gan: Stuart, R. V.
  Cyhoeddwyd: (1983)
• Topics in current physics, Vol.37: Thin film and depth profile analysis
  gan: Oechsner, H, Ed
  Cyhoeddwyd: (1984)
• Studies on laser induced and RF sputtered plasma using optical emission spectroscopy and langmuir probe
  gan: Joshy, N V
  Cyhoeddwyd: (2008)