Sputtering materials for VLSI and thin film devices /

Ítems similars

• Handbook of sputter deposition technology: fundamentals and applications for functional thin films, nano-materials and MEMS
  per: Wasa, Kiyotaka; Kanno, Isaku and Kotera, Hidetoshi
  Publicat: (2012)
• Vacuum technology, thin films, and sputtering : an introduction /
  per: Stuart, R. V.
  Publicat: (1983)
• Vacuum technology, thin films, and sputtering : an introduction /
  per: Stuart, R. V.
  Publicat: (1983)
• Topics in current physics, Vol.37: Thin film and depth profile analysis
  per: Oechsner, H, Ed
  Publicat: (1984)
• Studies on laser induced and RF sputtered plasma using optical emission spectroscopy and langmuir probe
  per: Joshy, N V
  Publicat: (2008)