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|a 9780815515937
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|a 0815515936
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| 082 |
0 |
4 |
|a 621.381
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| 100 |
1 |
|
|a Sarkar, Jaydeep
|
| 245 |
1 |
0 |
|a Sputtering materials for VLSI and thin film devices /
|c Jaydeep Sarkar.
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| 300 |
|
|
|a x, 603 pages :
|b illustrations ;
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| 504 |
|
|
|a Includes bibliographical references and index.
|
| 650 |
|
0 |
|a Microelectronics
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| 650 |
|
0 |
|a Cathode sputtering (Plating process)
|
| 650 |
|
0 |
|a Integrated circuits
|
| 650 |
|
0 |
|a Thin film devices
|
| 650 |
|
0 |
|a Flat panel displays
|
| 650 |
|
0 |
|a Sputtering (Physics)
|
| 942 |
|
|
|c BK
|
| 952 |
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|1 0
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|9 227099
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|b DOP
|d 2019-11-22
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|o 621.381
|p DOP2644
|r 2019-11-22
|w 2019-11-22
|y BK
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