Sputtering materials for VLSI and thin film devices /

Podrobná bibliografie
Hlavní autor: Sarkar, Jaydeep
Médium: Printed Book
Témata:
Microelectronics
Cathode sputtering (Plating process)
Integrated circuits
Thin film devices
Flat panel displays
Sputtering (Physics)
Popis
Fyzický popis:x, 603 pages : illustrations ;
Bibliografie:Includes bibliographical references and index.
ISBN:9780815515937
0815515936

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