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Semiconductors for micro- and nanotechnology : an introduction for engineers /
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Format: | Printed Book |
Published: |
Weinheim :
Wiley-VCH,
c2002.
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Online Access: | http://www.loc.gov/catdir/description/wiley0310/2002512459.html http://www.loc.gov/catdir/toc/wiley031/2002512459.html |