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Micro and nano fabrication : tools and processes with a forward and introduction by Richard S. Muller
Main Author: | |
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Format: | Printed Book |
Published: |
Springer-Verlag,Berlin
2015
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LEADER | 00510nam a2200145 4500 | ||
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020 | |c 5624.25 | ||
082 | |||
100 | |a Gatzen,Hans H,Saile,Volker and Leuthold,Jurg | ||
245 | |a Micro and nano fabrication : tools and processes with a forward and introduction by Richard S. Muller | ||
250 | |||
260 | |b Springer-Verlag,Berlin |c 2015 | ||
590 | |a Narendra Publishing house,Delhi |b " | ||
942 | |c BK | ||
999 | |c 185399 |d 185399 | ||
952 | |0 0 |1 0 |4 0 |7 0 |9 198748 |a DNT |b DNT |d 2019-10-25 |g 5624.25 |l 0 |p DNT774 |r 2019-10-25 |w 2019-10-25 |y BK |